UNSW School of Photovoltaic & Renewable Energy Engineering
Anodic Aluminium Oxide for Passivation of Silicon Solar Cells

Zhong Lu, at UNSW SPREE, 21 May 2015

Zhong Lu (36Min)


Zhong Lu speaks at UNSW SPREE


This talk explores the incorporation of Anodic Aluminium Oxide (AAO) into silicon solar cell structures to achieve localized contact and enhanced passivation. It is shown that localized contacts can be achieved with low contact resistance of ~ 6 mΩ.cm2 at 5% contact percentage. A method of fabricating AAO with a controllable stored charge is developed to optimize the passivation of various types of Si surfaces. This method involves the use of a pulse current source to anodize aluminium layers instead of the typically-used constant current/voltage source, with the test structures experiencing positive and negative cycles periodically. By tuning the positive cycle percentage, it is demonstrated that the effective stored charge density can be reliably manipulated in a range from –5.2 × 1011 to 2.5 × 1012 q/cm2 when the AAO is formed over a thin SiO2 layer. The investigation of the stored charge distribution in the dielectric stacks indicates a positive fixed charge at the SiO2/Si interface, a negative fixed charge at the AAO/SiO2 interface and a positive bulk charge in the AAO layer.

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Brief Bio

Zhong Lu received his Bachelor of Engineering degree from UNSW in 2011 with a first class honor and a University Medal. He started his PhD in photovoltaic engineering at UNSW in 2012 with an IPRS (and later an APA) scholarship. He developed a method of fabricating AAO with a controllable stored charge for semiconductor passivation. His research focuses on the applications of this method to passivate silicon surfaces and on C-V characterization of MIS structures.