Abstract
Laser doping is in principle an attractive process for the fabrication of localised contacts, particularly if doping and contact opening are carried out in a single step. However, the technique has been beset by practical difficulties arising partly from the highly complex and dynamic interaction between the different materials and the laser beam, and the difficulty of adequately characterising the result.
In this talk we discuss two specific issues encountered when attempting to create high quality laser doped regions, namely the properties of the edge regions of dielectric windows, and the impact of laser and dielectric parameters on the doping quality. We apply SEM dopant contrast imaging and photoluminescence imaging, together with modelling using the simulation package Quokka, to further our understanding of these aspects.
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Brief Bio
Klaus Weber received his B.E. degree in Electrical Engineering from the University of Adelaide in 1992, and his PhD in Engineering from the Australian National University in 1997. He co-invented and developed several thin film cell technologies. He has authored over 140 publications and is a recipient of the Weeks Award by the International Solar Energy Society and the Alan Walsh Medal for Service to Industry by the Australian Institute of Physics. He is currently Associate Professor at the ANU where his research interests include thin silicon cells and processes for high efficiency, industrial solar cells.
